JPS617028U - 半導体材料の水切乾燥装置 - Google Patents
半導体材料の水切乾燥装置Info
- Publication number
- JPS617028U JPS617028U JP8993284U JP8993284U JPS617028U JP S617028 U JPS617028 U JP S617028U JP 8993284 U JP8993284 U JP 8993284U JP 8993284 U JP8993284 U JP 8993284U JP S617028 U JPS617028 U JP S617028U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor material
- rond
- utility
- draining
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001035 drying Methods 0.000 title claims 3
- 239000000463 material Substances 0.000 title claims 3
- 239000004065 semiconductor Substances 0.000 title claims 3
- 230000000149 penetrating effect Effects 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8993284U JPS617028U (ja) | 1984-06-15 | 1984-06-15 | 半導体材料の水切乾燥装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8993284U JPS617028U (ja) | 1984-06-15 | 1984-06-15 | 半導体材料の水切乾燥装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS617028U true JPS617028U (ja) | 1986-01-16 |
JPH051074Y2 JPH051074Y2 (en]) | 1993-01-12 |
Family
ID=30644477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8993284U Granted JPS617028U (ja) | 1984-06-15 | 1984-06-15 | 半導体材料の水切乾燥装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS617028U (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02132943U (en]) * | 1989-04-07 | 1990-11-05 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53138278A (en) * | 1977-05-10 | 1978-12-02 | Toshiba Corp | Drier for wafer |
JPS55127163A (en) * | 1979-03-24 | 1980-10-01 | Mitsubishi Electric Corp | Automatic centrifugal dehydrating apparatus |
JPS55154336A (en) * | 1979-05-22 | 1980-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of optical fiber raw material |
-
1984
- 1984-06-15 JP JP8993284U patent/JPS617028U/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53138278A (en) * | 1977-05-10 | 1978-12-02 | Toshiba Corp | Drier for wafer |
JPS55127163A (en) * | 1979-03-24 | 1980-10-01 | Mitsubishi Electric Corp | Automatic centrifugal dehydrating apparatus |
JPS55154336A (en) * | 1979-05-22 | 1980-12-01 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of optical fiber raw material |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02132943U (en]) * | 1989-04-07 | 1990-11-05 |
Also Published As
Publication number | Publication date |
---|---|
JPH051074Y2 (en]) | 1993-01-12 |
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